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bsi. ...making excellence a habit Inspiring trust foramore resilient world 需要更多标准请联系 wechat: wpwyq310 BS IS0 22278:2020 BSl Standards Publication Fine ceramics (advanced ceramics, advanced technical ceramics) Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam bsi. BSISO22278:2020 BRITISH STANDARD Nationalforeword This British Standard is the UK implementation of IS022278:2020 The UK participation inits preparation was entrustedto Technical Committee RPI/13, Advancedtechnical ceramics. A list of organizations represented on this committee can be obtained on requestto its committeemanager. This publication does not purport to include all the necessary provisions of a contract.Users areresponsiblefor its correct application. @The British Standards Institution2020 Published by BSI Standards Limited 2020 ISBN 978 0 580 98589 8 ICS81.060.30 Compliance with a British Standard cannot confer immunity from legal obligations. This British Standard was published under the authority of the StandardsPolicyandStrategyCommitteeon31August2020. Amendments/corrigendaissuedsincepublication Date Text affected

.pdf文档 ISO 22278 2020 Fine ceramics (advanced ceramics advanced technical ceramics) Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

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