ISO INTERNATIONAL STANDARD 14644-12 Firstedition 2018-08 Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration Salles propres et environnements maitriseés apparentés - Partie 12: Spécification de la proprete de I'air en fonction de la concentration des nanoparticules Reference number ISO 14644-12:2018(E) OST @ IS0 2018 IS0 14644-12:2018(E) COPYRIGHTPROTECTEDDOCUMENT @ IS0 2018 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may below or Iso's member body in the country of the requester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +41 22 749 01 11 Fax: +41 22 749 09 47 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2018 - All rights reserved IS0 14644-12:2018(E) Contents Page Foreword ..iv Introduction ..V 1 Scope. ..1 2 Normativereferences ..1 3 Terms and definitions 3.1 General. .1 3.2 Size .2 3.3 Airborne particles 2 3.4 Occupancy states .3 3.5 Measuring apparatus. 3 4 Monitoring .3 4.1 General .3 4.2 Principle. 3 4.3 Methods. .3 5 Test report .4 Annex A (informative) Reference method for monitoring by condensation particle counting. ...5 Annex B (informative) Particle counting efficiency and particle size cutoff. .8 Bibliography .11 @ IS0 2018 - All rights reserved iii