ISO INTERNATIONAL STANDARD 14644-16 First edition 2019-05 Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices Salles propres et environnements maitrisés apparentés - Partie 16: Efficacite énergetique dans les salles propres et les dispositifs separatifs Reference number ISO 14644-16:2019(E) [so @ IS0 2019 IS0 14644-16:2019(E) COPYRIGHTPROTECTEDDOCUMENT @ IS0 2019 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either IsO at the address below or Iso's member body in the country of the requester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +41 22 749 01 11 Fax: +41 22 749 09 47 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2019 - All rights reserved IS0 14644-16:2019(E) Contents Page Foreword ..V Introduction. ..vi 1 Scope. ..1 2 Normative references 3 Terms and definitions 3.1 General terms.. .1 3.2 Terms related to installation 3.3 Terms related to energy efficiency. 4 3.5 Abbreviated terms 4 Energy reduction evaluation and implementation process ..5 4.1 General .5 4.2 New or existing cleanrooms. .6 4.3 Energy performance comparison 7 4.3.1 General ..7 4.3.2 Compare energy performance .7 4.3.3 Determine the business case. .7 4.3.4 Monitor and review.... 7 4.4 Existing cleanroom retrofit or renovation 7 4.5 Process for existing cleanrooms. 4.5.1 Select project team.. .8 4.5.2 Review user requirements and project scope .8 4.5.3 Collate information on cleanroom performance criteria 9 4.6 Process for design/construction of new build or updating cleanrooms .9 4.6.1 Review user requirements and project scope. .9 4.6.2 Undertake energy performance design review .9 4.7 Comparative review of cleanroom environmental performance .9 4.8 Identify energy reduction opportunities. .10 4.9 Assess the impact of energy reduction opportunities. ..10 4.10 Select energy reduction opportunities for implementation. .10 4.11 Implementation.. 10 4.12 Monitor, review and feedback. .11 4.13 Decommissioning.. .11 5 Impact of user requirement specification (URS) on energy consumption .11 5.1 Principle. .11 5.2 Garment levels ..11 6 Airflow volume and compensating factors .12 6.1 Fresh air supply .12 6.2 Airflow volume rate ..12 6.3 Source strength and airflow rate calculation for non-unidirectional rooms. ..12 6.3.1 Determining air volume flow rate .12 6.3.2 Ventilation effectiveness index. ..13 6.3.3 Compensation factors (Cf) .13 6.4 Flexible procedure for airflow rate estimation in non-UDAF rooms. ..14 6.4.1 General. .14 6.4.2 Design stage ..14 6.4.3 Testing stage ..15 6.4.4 Operational stage ..15 6.5 Air velocity reduction for unidirectional air flow systems. .. 15 7 Power management: turn-down, turn-off and recovery. ..15 7.1 Turn-down. ..15 7.2 Turn-off. ..16 @ IS0 2019 - All rights reserved ii