ISO INTERNATIONAL STANDARD 25178-607 First edition 2019-03 Geometrical product specifications (GPS) Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments Specification géomeétrique des produits (GPS)-Etat de surface Surfacique Partie 607: Caracteristiques nominales des instruments sans contact (microscopie confocale) Reference number IS0 25178-607:2019(E) ISO @IS02019 IS025178-607:2019(E) COPYRIGHTPROTECTEDDOCUMENT @ISO2019 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either IsO at the address below orIso's memberbody in the countryof therequester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone:+41227490111 Fax:+4122749 09 47 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2019- All rights reserved IS0 25178-607:2019(E) Contents Page Foreword ..iv Introduction. 1 Scope.. ..1 2 Normative references ..1 3 Terms and definitions .1 4 Descriptionsoftheinfluencequantities ..5 AnnexA(informative)Classificationofin-planescanningtechniquesforconfocalmicroscopes....7 AnnexB (informative)Theoryofoperationofconfocalmicroscopes. .13 AnnexC (informative)Thinandthickfilmswithconfocalmicroscopes ..17 AnnexD (informative) RelationtotheGPS matrixmodel ..19 Bibliography ..20 @ IS0 2019 -All rights reserved iii