ISO INTERNATIONAL STANDARD 13095 First edition 2014-07-15 Surface Chemical Analysis Atomic force microscopy Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement Analyse chimique des surfaces - Microscopie a balayage de sonde Procedure pour la caractérisation in situ des sondes AFM utilisées pour mesurer la nanostructure Reference number ISO 13095:2014(E) ISO @IS02014 ed without license from IHS Not for Resale IS0 13095:2014(E) COPYRIGHTPROTECTEDDOCUMENT @ISO2014 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56 : CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ IS0 2014 - All rights reserved or networking permited without license from IHS Not for Resale IS0 13095:2014(E) Contents Page Foreword .iv Introduction. ..V 1 Scope. ..1 2 Normative references ..1 3 Terms and definitions ..1 4 Symbols and abbreviated terms .3 5 Procedure for probe characterization .4 5.1 Methods for the determination of AFM probe shapes .4 5.2 Reference sample setting .5 5.3 Requirements of AFM and AFM imaging .6 5.4 Measurement of probe shank profile. 5.5 Uncertainty of the measurement of the probe shank profile .9 6 Reporting of probe characteristics. .10 Annex A (informative) Dependence of AFM images on measurement mode and settings ..12 Annex B (normative) Reference sample preparation ..15 Annex C (informative) Example of a reference structure ..18 Annex D (informative) Results of EPsC measurement repeatability test ..20 Annex E (informative) Plane correction for probe shank profile analysis ..22 Annex F (informative) Example of a report ..23 Bibliography .25 ii lout license from IHS Not for Resale