ISO INTERNATIONAL STANDARD 25178-603 First edition 2013-10-01 Geometrical product specifications (GPS) Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Spécification géométrique des produits (GPS) - Etat de surface: Surfacique Accessed by UNSW - LIBRARY on 15 Jun 2016 (Document currency not guaranteed when printed) Partie 603: Caracteristiques nominales des instruments sans contact (microscopes interférométriques a glissement de franges) Reference number IS0 25178-603:2013(E) TSO @ IS0 2013 IS025178-603:2013(E) COPYRIGHTPROTECTEDDOCUMENT @ISO2013 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56 : CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland ii @ IS0 2013 - All rights reserved IS0 25178-603:2013(E) Contents Page Foreword ..iv Introduction. ..vi Scope. .1 2 Terms and definitions .1 2.1 Terms and definitions related to all areal surface texture measurement methods .1 2.2 Terms and definitions related to x- and y-scanning systems ..8 2.3 Termsanddefinitionsrelatedtoopticalsystems 10 2.4 Terms and definitions related to optical properties of the workpiece ..12 2.5 Terms and definitions specific to phase-shifting interferometric microscopy ..12 3 Descriptions of the influence quantities .13 3.1 General ..13 3.2 Influence quantities. .14 Annex A (informative) Components of a phase-shifting interferometric (PsI) microscope. ..16 Annex B (informative) Phase-shifting interferometric (PsI) microscope - -Theoryof operation...17 Annex C (informative) Errors and corrections for phase-shifting interferometric (PsI) microscopes .22 Annex D (informative) Relation to the GPS matrix model. ..25 Bibliography. .27 @ IS0 2013 - All rights reserved iii