ISO INTERNATIONAL STANDARD 3567 First edition 2011-12-15 Vacuum gauges Calibration by direct comparison with a reference gauge Manometres — Etalonnage par comparaison directe avec un manometre de référence Reference number ISO 3567:2011(E) ISO ISO2011 ISO 3567:2011(E) Contents Page Foreword .iv Introduction 1 Scope 2 Normative references. 3 Terms and definitions 4 Symbols and abbreviated terms 5 General principle 6 Requirements .. 6.1 Design of calibration chamber. 6.2 Plumbing of gauges to calibration chamber. 6.3 Vacuum and gas inlet system 6.4 Calibration gas. 6.5 Thermometers and ambient condition 6.6 Reference gauge.. 7 Calibration 7.1 Procedure. 7.2 Evaluation of measurements 7.3 Measurement uncertainty 9 8 Calibration certificate.. .10 Annex A (informative) Example of possible calibration system set-up 11 Annex B (informative) Problems in practice. ..12 Bibliography 14 @ ISO 2011 - All rights reserved ii ISO 3567:2011(E) Foreword IsO (the International Organization for Standardization) is a worldwide federation of national standards bodies non-governmental,inliaisonwithlsO,alsotakepartinthework.IsOcollaboratescloselywiththeInternational Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the IsO/lEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. IsO shall not be held responsible for identifying any or all such patent rights. ISO3567waspreparedbyTechnical CommitteeISO/TC112,Vacuumtechnology. This first edition of ISO 3567 cancels and replaces ISO/TS 3567:2005, of which it constitutes a technical revision. iv @ ISO 2011 - All rights reserved