ISO INTERNATIONAL STANDARD 18516 Second edition 2019-01 Surface chemical analysis Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres Analyse chimique des surfaces Détermination de la résolution latérale et de la netteté par des méthodes a base de faisceau utilisant une gamme allant des nanometres aux micrometres Reference number IS0 18516:2019(E) os1 @IS02019 IS0 18516:2019(E) COPYRIGHTPROTECTEDDOCUMENT @ ISO 2019 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either IsO at the address below or Iso's member body in the country of the requester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +4122 749 0111 Fax: +41 22 749 09 47 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2019 - All rights reserved IS0 18516:2019(E) Contents Page Foreword ..V Introduction. ..vi 1 Scope. ...1 2 Normative references 3 Terms and definitions ..1 4 Symbols and abbreviated terms. ..3 5 General information 5.1 Background .4 5.2 Survey on principal methods to characterize lateral resolution in imaging surface chemicalanalvsis .5 5.3 Measurement of lateral resolution in imaging surface chemical analysis .6 5.4 Dependence of lateral resolution on scan direction. 6 5.5 Reporting result... .7 6 Measurement of lateral resolution using the straight edge method ..8 6.1 Introduction .8 6.2 Model functions and sharpness parameters ..8 6.3 Requirements for a test sample .9 6.4 Cleaning the straight-edge specimen .10 6.5 Mounting the straight-edge specimen ..10 6.6 Operating the instrument. ..10 6.7 Data acquisition requirements. .10 6.8 Determination of D12-88.. ..11 6.9 Determination of line spread function. ..11 6.10 Reporting. ..11 7 Measurement of lateral resolution using the narrow line method ..13 7.1 Introduction ..13 7.2 Requirements for a test sample ..13 7.3 Cleaning the narrow stripe specimen. ..13 7.4 Mounting the narrow stripe specimen .14 7.5 Operatingtheinstrument ..14 7.6 Data acquisition requirements. ..14 7.7 Determination of wLSF .14 7.8 Reporting. .15 8 Measurement of lateral resolution using the grating method. ..17 8.1 Introduction ..17 8.2 Requirements for a test sample .17 8.3 Cleaning the grating specimen .19 8.4 Mounting the grating specimen. 19 8.5 Operating the instrument. .20 8.6 Data acquisition 20 8.7 Estimation of effective lateral resolution re by visual inspection of an image or a linescan. .20 8.8 Determination of effective lateral resolution re by numerical analysis of a line profile....23 8.8.1 General 23 8.8.2 Consideration of noise and determination of reduced noise oNr 23 8.8.3 Determination of dip D. 24 8.8.4 Resolution criterion. 25 8.9 Determination of the effective lateral resolution re using graded gratings .26 8.9.1 Estimation of effective lateral resolution re by using the resolution criterion in Formula (17) .26 @ IS0 2019 - All rights reserved ii